surfaces over measurement ranges from a few tens of µm² to a few mm², with a lateral resolution of order of 200 nm and a vertical resolution ranging from nanometers to several tens of µm.
Optical profilometry in confocal mode makes it possible to produce images with very shallow depth of field or “optical sections”. By positioning the focal plane of the objective at different depth levels below the surface of the sample and eliminating light from out-of-focus points, it is possible to produce series of images from which a three-dimensional representation of the The object is reconstructed.
It is possible to go up to a 100X objective, for each of these magnifications the PO3D provides the associated roughness parameters.