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ToF-SIMS
ION TOF - TOF 5
Time-of-Flight Secondary Ion Mass Spectrometry (ToF SIMS)
is a very sensitive and powerful tool, used for molecular
Surface Analysis
(molecular information on the first monolayer), molecular or elemental
Chemical Imaging
(lateral resolution 0.1 µm) , and molecular and elemental
Depth Profiling
(up to 10-15 µm, nm z resolution)
Samples analyzed:
all UHV compliant materials
Insulators, polymers, organic products, biological samples, powders, glass, semiconductor, metal, alloys
High mass resolution (< 10.000)
High Precision (< 10 ppm)
Mass detection (< 15000 D)
Analyzed depth from 0,2 to 0,5 nm (1 monolayer)
High Lateral Resolution (down to 0.1 µm)
Multiple Ion Sources : Bi et clusters (Bi
3
, Bi
5
) for analysis ; O
2
, Cs and GCIS for abrasion
Cold finger (for volatile compounds on materials surface or for depth profiles on materials containing mobile elements as Li)
Maximum sample dimensions : -L x l : 60 x 60 mm², thickness 10 mm, weight < 100 g