Optical profilometry is used to get the XYZ topography (structure, roughness, dimensions) of a sample surface for dimensions ranging from 100x100 µm² to a few mm². 

Sample analyzed: all type of solid materials
  • Analysis  area : 100x100 µm² to a few mm²
  • Vertical (Z) resolution : 0.1 nm
  • Lateral (XY) re : 200 nm
  • D√©placement vertical maximal pendant la mesure : 5 µm
  • Mesures √† l'air