FIB SEM 

TESCAN - FERA3 

Electron Gun High Brightness Schottky Emitter
 

FIB Plasma Xe

  • Resolution: 25 nm at 30kV at SEM-FIB coincidence point
  • Magnification: minimum 150x at coincidence point and 10 kV (corresponding to 1 mm view field), maximum 1,000,000x
  • Accelerating voltage: 3 kV to 30 kV
  • Source : Xe Plasma
FERA3-XM-N02_1825.jpg

TESCAN - LYRA3 

Electron Gun High Brightness Schottky Emitter
 

FIB Ga

  • Ion Column: Cobra Ion Gun Ga Liquid Metal Ion Source
  • Accelerating voltage:  0.5 kV to 30 kV
  • Probe Current 1 pA to 40 nA / 1 pA to 50 nA
  • Resolution:< 5 nm at 30 keV / < 2.5 nm at 30 keV (at SEM-FIB coincidence point)
  • Magnification: minimum 150 × au point de coincidence et à 10 keV (corresponding to 1 mm view field), maximum 1,000,000 × SEM-FIB Coincidence at WD 9 mm for SEM – WD 12 mm for FIB SEM-FIB angle 55˚
LYRA3-GM-N02_7839.jpg