FIB SEM 

Focus Ion Beam Scanning Electron Microscopy (FIB-SEM) has become an essential tool for materials science and engineering. TESCAN offers an extended portfolio of turnkey systems, tailored to help scientists and researchers in materials science make progress and achieve their goals. TESCAN’s broad range of dedicated and innovative instruments is part of our firm commitment to push materials science forward.

TESCAN - SOLARIS X

Electron Gun High Brightness Schottky Emitter
 

FIB Plasma Xe

  • Curtaining-free large-area cross-sectioning for physical failure analysis of advanced packaging technologies
  • Prepare large area FIB-cross-sections up to 1 mm wide
  • Obtain low noise, high-resolution image at low keVs in short acquisition time at FIB-SEM coincidence with the sample tilted
  • Live SEM-monitoring during FIB milling for precise end-pointing

 

  • Observe the most beam-sensitive materials using low keVs ultra-high resolution for surface sensitivity and high material contrast
  • Effective techniques and recipes for fast and artefact-free cross-sectioning of composite samples (OLED and TFT displays, MEMS devices, isolation dielectrics) at high currents
  • Essence™ easy-to-use modular user interface
TESCAN SOLARIS

TESCAN - AMBER 

Electron Gun High Brightness Schottky Emitter
 

FIB Ga

  • High precision micro sample preparation
  • Ultra-high resolution field-free SEM imaging and nanoanalysis
  • Extended field of view and easy navigation
  • Multi-site process automation

 

  • Multi-modal FIB-SEM tomography
  • Easy-to-use modular software user interface
  • Attractive optional packages for various applications



 
TESCAN AMBER