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FIB SEM
FIB SEM
TESCAN - FERA3
Electron Gun High Brightness Schottky Emitter
FIB Plasma Xe
Resolution:
25 nm at 30kV at SEM-FIB coincidence point
Magnification
: minimum 150x at coincidence point and 10 kV (corresponding to 1 mm view field), maximum 1,000,000x
Accelerating voltage:
3 kV to 30 kV
Source
: Xe Plasma
FERA 3 - TESCAN
TESCAN - LYRA3
Electron Gun High Brightness Schottky Emitter
FIB Ga
Ion Column:
Cobra Ion Gun Ga Liquid Metal Ion Source
Accelerating voltage:
0.5 kV to 30 kV
Probe Current 1 pA to 40 nA / 1 pA to 50 nA
Resolution:
< 5 nm at 30 keV / < 2.5 nm at 30 keV (at SEM-FIB coincidence point)
Magnification
: minimum 150 × au point de coincidence et à 10 keV (corresponding to 1 mm view field), maximum 1,000,000 × SEM-FIB Coincidence at WD 9 mm for SEM – WD 12 mm for FIB SEM-FIB angle 55˚
LYRA 3 - TESCAN
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