TescanSurface Analytical Service Equipment FIB SEM

FIB SEM

TESCAN - FERA3

Electron Gun High Brightness Schottky Emitter

FIB Plasma Xe

Resolution: 25 nm at 30kV at SEM-FIB coincidence point
Magnification: minimum 150x at coincidence point and 10 kV (corresponding to 1 mm view field), maximum 1,000,000x
Accelerating voltage: 3 kV to 30 kV
Source : Xe Plasma

FERA 3 - TESCAN

TESCAN - LYRA3

Electron Gun High Brightness Schottky Emitter

FIB Ga

Ion Column: Cobra Ion Gun Ga Liquid Metal Ion Source
Accelerating voltage: 0.5 kV to 30 kV
Probe Current 1 pA to 40 nA / 1 pA to 50 nA
Resolution:< 5 nm at 30 keV / < 2.5 nm at 30 keV (at SEM-FIB coincidence point)
Magnification: minimum 150 × au point de coincidence et à 10 keV (corresponding to 1 mm view field), maximum 1,000,000 × SEM-FIB Coincidence at WD 9 mm for SEM – WD 12 mm for FIB SEM-FIB angle 55˚

LYRA 3 - TESCAN

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